Products
IPG SIoT contributes to the improvement of semiconductor yield through acceleration information monitoring, humidity and temperature which is transmitted by sensor device based ARTIK5 installed in FOUP(Front Opening Unified Pod or Front Opening Universal Pod) system for internal wafer transport devices.
Main Category | Sub Category | Description |
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Interworking | Sensor Device |
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Authentication Server |
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Sensor Device Management | Device Management |
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Configuration |
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FOUP Management |
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Collection History | Device History |
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Collection History |
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Alarm History |
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Configuration | Firmware Management |
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Operator Management |
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